Development of a MEMS Testing Methodology
نویسندگان
چکیده
منابع مشابه
Development of MEMS Testing Methodology
Microelectromechanical systems (MEMS) are miniature electromechanical sensor and actuator systems developed from the mature batch-fabricated processes of VLSI technologies. Projected growth in the MEMS market requires significant advances in CAD and manufacturing for MEMS. These advances must be accompanied with testing methodologies that ensure both high quality and reliability. Effectiveness ...
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